Support Facility

Small Vacuum Chamber A

Small Vacuum Chamber A consists of a vacuum vessel and vacuum pumps, and is used mainly to perform thermal vacuum tests on small materials and equipment. The vacuum pumps evacuate air from the vacuum vessel to achieve a high-vacuum (vacuum level: 1.3 × 10-3 Pa).

Small Vacuum Chamber B

Small Vacuum Chamber B consists of a vacuum vessel and vacuum pumps, and it is used mainly to perform thermal vacuum tests on small materials and equipment. The vacuum pumps evacuate air from the vacuum vessel to achieve a high-vacuum (vacuum level: 1.3×10-3 Pa). Small Vacuum Chamber B is also equipped with a temperature control plate inside the chamber, allowing adjustment of the specimen temperature. In addition, it has 20 ports for connecting thermocouples, enabling temperature measurements inside the vacuum chamber.

Vacuum Bake-Out Oven

This is designed primarily for small devices and removes volatile substances that can cause contamination by heating under vacuum conditions. It features a timer function for auto-start and auto-stop, as well as an eight-step programmable control.

Thermostatic Chamber

This is designed primarily for small devices and enables thermal shock tests by repeatedly applying temperature differences between high and low temperatures. The chamber allows temperature control up to 100°C and down to −40°C.